Optimization altic etching process using flowinated gases | |
Author | Ekawit Hensirisak |
Call Number | AIT Thesis no.ISE-09-38 |
Subject(s) | Etching Magnetic recorders and recording Heads |
Note | A thesis submitted in partial fulfillment of the requirements for the degree of Master of Engineering (Hard Disc Drive Engineering Technology), School of Engineering and Technology |
Publisher | Asian Institute of Technology |
Series Statement | Thesis ; no. ISE-09-38 |
Year | 2009 |
Corresponding Series Added Entry | Asian Institute of Technology. Thesis ; no. ISE-09-38 |
Type | Thesis |
School | School of Engineering and Technology (SET) |
Department | Department of Industrial Systems Engineering (DISE) |
Academic Program/FoS | Industrial Systems Engineering (ISE) |
Chairperson(s) | Dutta, Joydeep |
Examination Committee(s) | Chancana Thanachayanont;Krisada Siangchaew |
Scholarship Donor(s) | Western Di gital (Thailand) Co., Ltd;NECTEC |
Degree | Thesis (M.Eng.) - Asian Institute of Technology, 2009 |