1 AIT Asian Institute of Technology

Optimization altic etching process using flowinated gases

AuthorEkawit Hensirisak
Call NumberAIT Thesis no.ISE-09-38
Subject(s)Etching
Magnetic recorders and recording Heads

NoteA thesis submitted in partial fulfillment of the requirements for the degree of Master of Engineering (Hard Disc Drive Engineering Technology), School of Engineering and Technology
PublisherAsian Institute of Technology
Series StatementThesis ; no. ISE-09-38
Year2009
Corresponding Series Added EntryAsian Institute of Technology. Thesis ; no. ISE-09-38
TypeThesis
SchoolSchool of Engineering and Technology (SET)
DepartmentDepartment of Industrial Systems Engineering (DISE)
Academic Program/FoSIndustrial Systems Engineering (ISE)
Chairperson(s)Dutta, Joydeep
Examination Committee(s)Chancana Thanachayanont;Krisada Siangchaew
Scholarship Donor(s)Western Di gital (Thailand) Co., Ltd;NECTEC
DegreeThesis (M.Eng.) - Asian Institute of Technology, 2009


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